Calculation of conditions for maintaining an ICRF-plasma using a self-consistent model

Abstract

The article proposes a new approach to calculating the strength of the magnetic field on the inner wall of the discharge chamber, which is necessary to maintain a steady state of a low-pressure ICRF discharge. The model is treate as a nonlinear eigenproblem. The influence of the third type boundary conditions for electron density as well as and the nonlinear boundary conditions for electrical strength is considered. This approach makes it possible solving two problems of designing ICRF plasma torches: for a given electron density in the discharge find the magnetic field strength that ensures the maintenance of the discharge, or, conversely, at a given magnetic field strength, determine the value of the electron density that can be created in the discharge. In addition, the radial distributions of the electric and magnetic fields and the electron concentration can be determined.