Experimental installation to study the RF plasma flow at low pressures with experiment data synchronization

Zheltukhin V.S.; Terentev T.N.; Shemakhin E.Y.; Sofronitsky A.O.; Shemakhin A.Y.

Experimental installation to study the RF plasma flow at low pressures with experiment data synchronization

Shemakhin A.Y.; Zheltukhin V.S.; Shemakhin E.Y.; Terentev T.N.; Sofronitsky A.O.

URI: https://dspace.kpfu.ru/xmlui/handle/net/161182

Date: 2020

Abstract:

© 2020 Published under licence by IOP Publishing Ltd. A diagram and description of an experimental setup for studying the properties of a stream of RF plasma at low pressure are presented. The setup is equipped with diagnostic devices that record the temperature, volt-ampere characteristics, and pressure in the chamber.

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Публикации сотрудников КФУ Scopus [24551]
Коллекция содержит публикации сотрудников Казанского федерального (до 2010 года Казанского государственного) университета, проиндексированные в БД Scopus, начиная с 1970г.