Experimental installation to study the RF plasma flow at low pressures with experiment data synchronization

dc.contributor.author	Shemakhin A.Y.
dc.contributor.author	Zheltukhin V.S.
dc.contributor.author	Shemakhin E.Y.
dc.contributor.author	Terentev T.N.
dc.contributor.author	Sofronitsky A.O.
dc.date.accessioned	2021-02-25T06:52:10Z
dc.date.available	2021-02-25T06:52:10Z
dc.date.issued	2020
dc.identifier.issn	1742-6588
dc.identifier.uri	https://dspace.kpfu.ru/xmlui/handle/net/161182
dc.description.abstract	© 2020 Published under licence by IOP Publishing Ltd. A diagram and description of an experimental setup for studying the properties of a stream of RF plasma at low pressure are presented. The setup is equipped with diagnostic devices that record the temperature, volt-ampere characteristics, and pressure in the chamber.
dc.relation.ispartofseries	Journal of Physics: Conference Series
dc.title	Experimental installation to study the RF plasma flow at low pressures with experiment data synchronization
dc.type	Conference Paper
dc.relation.ispartofseries-issue	1
dc.relation.ispartofseries-volume	1588
dc.collection	Публикации сотрудников КФУ
dc.source.id	SCOPUS17426588-2020-1588-1-SID85090792814

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Публикации сотрудников КФУ Scopus [24551]
Коллекция содержит публикации сотрудников Казанского федерального (до 2010 года Казанского государственного) университета, проиндексированные в БД Scopus, начиная с 1970г.