Solution of the problem of interaction between capacitive coupled radio-frequency discharge and a sample

Abstract

© Published under licence by IOP Publishing Ltd.The numerical study of interaction between the capacitive coupled radio frequency (CCRF) discharge and materials is performed. A nonlinear problem, which includes initialboundary value problems for electron, ion, neutral atom, metastable atom, gas temperature and Poisson's equation is solved. A harmonic voltage on the loaded electrodes and Ohm's law for the sample is assumed. A results of calculations of the model problem at pressure p=760 Torr, frequency of generator f=13.76 MHz in local approximation are presented.