Solution of the problem of interaction between capacitive coupled radio-frequency discharge and a sample

dc.contributor.author	Chebakova V.
dc.contributor.author	Gaisin A.
dc.contributor.author	Zheltukhin V.
dc.date.accessioned	2018-09-19T21:44:12Z
dc.date.available	2018-09-19T21:44:12Z
dc.date.issued	2016
dc.identifier.issn	1757-8981
dc.identifier.uri	https://dspace.kpfu.ru/xmlui/handle/net/144351
dc.description.abstract	© Published under licence by IOP Publishing Ltd.The numerical study of interaction between the capacitive coupled radio frequency (CCRF) discharge and materials is performed. A nonlinear problem, which includes initialboundary value problems for electron, ion, neutral atom, metastable atom, gas temperature and Poisson's equation is solved. A harmonic voltage on the loaded electrodes and Ohm's law for the sample is assumed. A results of calculations of the model problem at pressure p=760 Torr, frequency of generator f=13.76 MHz in local approximation are presented.
dc.relation.ispartofseries	IOP Conference Series: Materials Science and Engineering
dc.title	Solution of the problem of interaction between capacitive coupled radio-frequency discharge and a sample
dc.type	Conference Paper
dc.relation.ispartofseries-issue	1
dc.relation.ispartofseries-volume	158
dc.collection	Публикации сотрудников КФУ
dc.source.id	SCOPUS17578981-2016-158-1-SID85014409840

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Публикации сотрудников КФУ Scopus [24551]
Коллекция содержит публикации сотрудников Казанского федерального (до 2010 года Казанского государственного) университета, проиндексированные в БД Scopus, начиная с 1970г.