Capacitive coupled RF discharge: Modelling at the local statement of the problem

Abstract

© Published under licence by IOP Publishing Ltd.In this paper a mathematical model of capacitively coupled RF discharge at atmospheric pressure is constructed, a method of numerical realization of the model is developed, and the numerical calculations are carried out. Comparison of the results of the numerical experiments with the data of other authors, in particular, with the experimental data, is demonstrated as well a model adequacy as effectiveness of the numerical method. A results of calculations of the model problem at pressure of 760 Torr, frequency of generator of 13.76 MHz and interelectrode distance of 20mm, in local approximation are presented.