Capacitive coupled RF discharge: Modelling at the local statement of the problem

dc.contributor.author	Badriev I.
dc.contributor.author	Chebakova V.
dc.contributor.author	Zheltukhin V.
dc.date.accessioned	2018-09-19T21:36:30Z
dc.date.available	2018-09-19T21:36:30Z
dc.date.issued	2017
dc.identifier.issn	1742-6588
dc.identifier.uri	https://dspace.kpfu.ru/xmlui/handle/net/144202
dc.description.abstract	© Published under licence by IOP Publishing Ltd.In this paper a mathematical model of capacitively coupled RF discharge at atmospheric pressure is constructed, a method of numerical realization of the model is developed, and the numerical calculations are carried out. Comparison of the results of the numerical experiments with the data of other authors, in particular, with the experimental data, is demonstrated as well a model adequacy as effectiveness of the numerical method. A results of calculations of the model problem at pressure of 760 Torr, frequency of generator of 13.76 MHz and interelectrode distance of 20mm, in local approximation are presented.
dc.relation.ispartofseries	Journal of Physics: Conference Series
dc.title	Capacitive coupled RF discharge: Modelling at the local statement of the problem
dc.type	Conference Paper
dc.relation.ispartofseries-issue	1
dc.relation.ispartofseries-volume	789
dc.collection	Публикации сотрудников КФУ
dc.source.id	SCOPUS17426588-2017-789-1-SID85014627586

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Публикации сотрудников КФУ Scopus [24551]
Коллекция содержит публикации сотрудников Казанского федерального (до 2010 года Казанского государственного) университета, проиндексированные в БД Scopus, начиная с 1970г.