Abnormal glow discharge in crossed electric and magnetic fields in the presence of reactive gas

Abstract

The results of investigations of the low-temperature plasma at process of reactive magnetron sputtering of Ti target in the presence of reactive gas are described. Discharge volt-ampere characteristics for different schemas of reactive gas input are build. Optimal regimes of making strengthening coatings are defined. TiOx (0 < x < 2) strengthening coatings at plastics are made. Coatings showed high consumer qualities. © Published under licence by IOP Publishing Ltd.