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dc.contributor.author | Luchkin A. | |
dc.contributor.author | Kashapov N. | |
dc.contributor.author | Luchkin G. | |
dc.date.accessioned | 2018-09-18T20:25:02Z | |
dc.date.available | 2018-09-18T20:25:02Z | |
dc.date.issued | 2013 | |
dc.identifier.issn | 1742-6588 | |
dc.identifier.uri | https://dspace.kpfu.ru/xmlui/handle/net/139665 | |
dc.description.abstract | The results of investigations of the low-temperature plasma at process of reactive magnetron sputtering of Ti target in the presence of reactive gas are described. Discharge volt-ampere characteristics for different schemas of reactive gas input are build. Optimal regimes of making strengthening coatings are defined. TiOx (0 < x < 2) strengthening coatings at plastics are made. Coatings showed high consumer qualities. © Published under licence by IOP Publishing Ltd. | |
dc.relation.ispartofseries | Journal of Physics: Conference Series | |
dc.title | Abnormal glow discharge in crossed electric and magnetic fields in the presence of reactive gas | |
dc.type | Conference Paper | |
dc.relation.ispartofseries-issue | 1 | |
dc.relation.ispartofseries-volume | 479 | |
dc.collection | Публикации сотрудников КФУ | |
dc.source.id | SCOPUS17426588-2013-479-1-SID84891812367 |