Mathematical modelling of RF plasma flow at low pressure with electrodynamics

Abstract

© Published under licence by IOP Publishing Ltd. The mathematical model of the RF plasma at low pressure in both free-molecule and transition flow at Knudsen 0.03 ≤ Kn ≤ 3 is described. The model is based on the statistical approach for the neutral component of the plasma together with the continuum model for electron, electromagnetic field and metastable components. Results of plasma flow parameters calculations and testing results of electric field calculations are presented.