Mathematical modelling of RF plasma flow at low pressure with electrodynamics

dc.contributor.author	Shemakhin A.
dc.contributor.author	Zheltukhin V.
dc.date.accessioned	2018-04-05T07:09:59Z
dc.date.available	2018-04-05T07:09:59Z
dc.date.issued	2017
dc.identifier.issn	1742-6588
dc.identifier.uri	http://dspace.kpfu.ru/xmlui/handle/net/130103
dc.description.abstract	© Published under licence by IOP Publishing Ltd. The mathematical model of the RF plasma at low pressure in both free-molecule and transition flow at Knudsen 0.03 ≤ Kn ≤ 3 is described. The model is based on the statistical approach for the neutral component of the plasma together with the continuum model for electron, electromagnetic field and metastable components. Results of plasma flow parameters calculations and testing results of electric field calculations are presented.
dc.relation.ispartofseries	Journal of Physics: Conference Series
dc.title	Mathematical modelling of RF plasma flow at low pressure with electrodynamics
dc.type	Conference Paper
dc.relation.ispartofseries-issue	1
dc.relation.ispartofseries-volume	927
dc.collection	Публикации сотрудников КФУ
dc.source.id	SCOPUS17426588-2017-927-1-SID85037695102

Файлы в этом документе

Имя: SCOPUS17426588-20 ...

Размер: 45.43Kb

Формат: PDF

Публикации сотрудников КФУ Scopus [24551]
Коллекция содержит публикации сотрудников Казанского федерального (до 2010 года Казанского государственного) университета, проиндексированные в БД Scopus, начиная с 1970г.