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Formation of porous germanium layers with various surface morphology in dependence on mass of implanted ions | 153 |
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Formation of porous germanium layers with various surface morphology in dependence on mass of implanted ions | 3 | 8 | 3 | 6 | 0 | 11 | 27 |
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SCOPUS24522139-2020-19-SID85079378546-p1.pdf | 4 |
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Russia | 59 |
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