New approach to create a counting grid by ion-mask implantation for analysis of small biological objects

Abstract

© 2019 Elsevier Ltd A new method of forming substrates (devices) with periodic micron surface grids for statistical analysis and visual characterization of ultra-small biological objects and microorganisms is suggested. For this aim an implantation by Ar+ of silicate glasses through surface masks as wire meshes is used to form surface periodic structures in the form of grating with cell sizes of 25 μm and a depth of 100 nm. Testing of novel types of devices was carried out applying scanning electron and atomic force microscopy, as well as EDX analysis using substrates with deposited bacteria as Bacillus subtilis.