Аннотации:
© Published under licence by IOP Publishing Ltd. In this paper, we consider a method of protecting the surface of the components of a gas analytical system from corrosion and adsorption of sulfur-containing compounds. To solve this problem in the oil and gas industry, in particular in industrial analytical equipment, silicon coatings are used that are inert with respect to the measured substances. Based on the analysis, the regularity of the formation of films of silicon films obtained by plasma-chemical deposition (PECVD) on stainless steel products was investigated.