Mathematical modelling of RF plasma flow at low pressure with metastable and electrodynamics

dc.contributor.author	Zheltukhin V.
dc.contributor.author	Shemakhin A.
dc.date.accessioned	2020-01-15T21:48:54Z
dc.date.available	2020-01-15T21:48:54Z
dc.date.issued	2019
dc.identifier.issn	1742-6588
dc.identifier.uri	https://dspace.kpfu.ru/xmlui/handle/net/156164
dc.description.abstract	© Published under licence by IOP Publishing Ltd. A mathematical model of the RF plasma flow at 0.15-150 Pa, Knudsen 0.03≤Kn≤3 with metastable atoms and electrodynamics is described. The model based on both astatistical approach for the neutral component of the RF plasma and the continuum model for electron, ion components, metastable and electric field. The results of plasma flow calculations for an undisturbed jet are described.
dc.relation.ispartofseries	Journal of Physics: Conference Series
dc.title	Mathematical modelling of RF plasma flow at low pressure with metastable and electrodynamics
dc.type	Conference Paper
dc.relation.ispartofseries-issue	4
dc.relation.ispartofseries-volume	1158
dc.collection	Публикации сотрудников КФУ
dc.source.id	SCOPUS17426588-2019-1158-4-SID85063788752

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Публикации сотрудников КФУ Scopus [24551]
Коллекция содержит публикации сотрудников Казанского федерального (до 2010 года Казанского государственного) университета, проиндексированные в БД Scopus, начиная с 1970г.