Mathematical modelling of RF plasma flow at low pressure with metastable and electrodynamics

Abstract

© Published under licence by IOP Publishing Ltd. A mathematical model of the RF plasma flow at 0.15-150 Pa, Knudsen 0.03≤Kn≤3 with metastable atoms and electrodynamics is described. The model based on both astatistical approach for the neutral component of the RF plasma and the continuum model for electron, ion components, metastable and electric field. The results of plasma flow calculations for an undisturbed jet are described.