Parametrically excited microelectromechanical system in the problems of orientation of moving objects

Abstract

© Published under licence by IOP Publishing Ltd. A mathematical model of the microelectromechanical system (MEMS) is obtained, which performs the task of orienting mobile objects. A distinctive feature of the construction of such MEMS is its parametric excitation by modulating the static stiffness of the suspension of the sensitive element. Based on the analysis of model equations, the possibility of determining the direction of the true meridian with the required accuracy is shown. The results of numerical calculations are given that allow not only to illustrate the operation of the device as a high-speed gyrocompass, but also to determine the conditions that ensure the stable operation of the device in the incoherent mode of its excitation.