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Simulation of electron moving in RF capacitively coupled discharge
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| dc.contributor.author | Askhatov R. | |
| dc.contributor.author | Badriev I. | |
| dc.contributor.author | Chebakova V. | |
| dc.contributor.author | Zheltukhin V. | |
| dc.date.accessioned | 2019-01-22T20:47:27Z | |
| dc.date.available | 2019-01-22T20:47:27Z | |
| dc.date.issued | 2018 | |
| dc.identifier.issn | 1742-6588 | |
| dc.identifier.uri | https://dspace.kpfu.ru/xmlui/handle/net/148787 | |
| dc.description.abstract | © 2018 Institute of Physics Publishing. All rights reserved. An algorithm of simulation of kinetic movement of electrons in alternating-current field of radio-frequency capacitively coupled discharge is presented in the paper. The results of solving of modelling problems are presented also. | |
| dc.relation.ispartofseries | Journal of Physics: Conference Series | |
| dc.title | Simulation of electron moving in RF capacitively coupled discharge | |
| dc.type | Conference Paper | |
| dc.relation.ispartofseries-issue | 1 | |
| dc.relation.ispartofseries-volume | 1058 | |
| dc.collection | Публикации сотрудников КФУ | |
| dc.source.id | SCOPUS17426588-2018-1058-1-SID85051859166 |
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Публикации сотрудников КФУ Scopus [24551]
Коллекция содержит публикации сотрудников Казанского федерального (до 2010 года Казанского государственного) университета, проиндексированные в БД Scopus, начиная с 1970г.