Simulation of electron moving in RF capacitively coupled discharge

Chebakova V.; Badriev I.; Askhatov R.; Zheltukhin V.

Simulation of electron moving in RF capacitively coupled discharge

Askhatov R.; Badriev I.; Chebakova V.; Zheltukhin V.

URI: https://dspace.kpfu.ru/xmlui/handle/net/148787

Date: 2018

Abstract:

© 2018 Institute of Physics Publishing. All rights reserved. An algorithm of simulation of kinetic movement of electrons in alternating-current field of radio-frequency capacitively coupled discharge is presented in the paper. The results of solving of modelling problems are presented also.

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Публикации сотрудников КФУ Scopus [24551]
Коллекция содержит публикации сотрудников Казанского федерального (до 2010 года Казанского государственного) университета, проиндексированные в БД Scopus, начиная с 1970г.