A Diamond Diffraction Grating Formed via Ion Implantation

Abstract

© 2018, Allerton Press, Inc. A fundamentally new way of fabricating a diffraction grating on a surface of diamond via ion (boron) implantation through a superimposed mask is proposed. It is found that graphitization occurs during ion irradiation in unmasked areas in the near-surface region. This graphitization results in the swelling of the surface layer and the formation of a phase periodic structure.