dc.contributor.author |
Zheltukhin V. |
|
dc.contributor.author |
Shemakhin A. |
|
dc.date.accessioned |
2018-09-18T20:47:57Z |
|
dc.date.available |
2018-09-18T20:47:57Z |
|
dc.date.issued |
2014 |
|
dc.identifier.issn |
2070-0482 |
|
dc.identifier.uri |
https://dspace.kpfu.ru/xmlui/handle/net/142279 |
|
dc.description.abstract |
© 2014, Pleiades Publishing, Ltd. A mathematical model that describes RF plasma flowing at a pressure of 13.3–133 Pa and a Knudsen number of 8 × 10−3 ≤ Kn ≤ 7 × 10−2 for the carrying gas is presented. The model is based on the statistical approach for a neutral plasma component and on a continuum model for electron and ion components. The results of the calculation for the neutral plasma component flowing in an undisturbed flow and, if the sample is in a circumfluent flow, are presented. The results of the calculation for the problem on an electron-ion gas are also given. |
|
dc.relation.ispartofseries |
Mathematical Models and Computer Simulations |
|
dc.subject |
jet flow |
|
dc.subject |
low pressure |
|
dc.subject |
Monte-Carlo method |
|
dc.subject |
radio-frequency plasma |
|
dc.subject |
simulation |
|
dc.subject |
statistical simulation |
|
dc.subject |
transient mode |
|
dc.title |
Simulation of RF plasma flowing at low pressure |
|
dc.type |
Article |
|
dc.relation.ispartofseries-issue |
1 |
|
dc.relation.ispartofseries-volume |
6 |
|
dc.collection |
Публикации сотрудников КФУ |
|
dc.relation.startpage |
101 |
|
dc.source.id |
SCOPUS20700482-2014-6-1-SID84925970675 |
|