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Simulation of RF plasma flowing at low pressure | 103 |
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Simulation of RF plasma flowing at low pressure | 5 | 3 | 1 | 0 | 6 | 1 | 1 |
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SCOPUS20700482-2014-6-1-SID84925970675-a1.pdf | 4 |
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Russia | 81 |
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Kazan | 81 |