Аннотации:
© 2014 Irek Husnemardanovich Israphilov et al. Conducted comprehensive studies of the existing thermal bottom electrode (BE) in process. Considered separately BE coolant. The optimum parameters of copper BE (water-coolant, wall temperatures and geometric parameters) under specific operating conditions calculated. Drawn up formulas and graphs to determine the optimum geometrical parameters of BE under different operating conditions. Calculation and simulation of BE in process are held.