On solving of some nonlinear problems of plasma physics

Abstract

© 2015 V. S. Zheltukhin et al. The non-linear problem of finding the parameters of interaction of radio-frequency capacitive discharge with the sample placed on the electrode is considered in a local approach. The problem is described by a system of nonlinear initial value problems. Approximate method of solving the problem is proposed. The numerical results for the model problem are given together with their analysis.