Ion source surface processing based on glow discharge in supersonic cross gas flow control

dc.contributor.author	Israphilov D.
dc.date.accessioned	2018-04-05T07:10:03Z
dc.date.available	2018-04-05T07:10:03Z
dc.date.issued	2017
dc.identifier.issn	1757-8981
dc.identifier.uri	http://dspace.kpfu.ru/xmlui/handle/net/130154
dc.description.abstract	© Published under licence by IOP Publishing Ltd. Surface treatment by glow discharge in a transverse gas flow provides a number of advantages over magnetron discharge. Sputtering target at lower pressures, which increases the purity of the deposited material. In addition, more uniform erosion of target and thickness of deposited coating. However is necessary to develop glow discharge control system in cross flow working gas, which allow to obtain products with desired characteristics.
dc.relation.ispartofseries	IOP Conference Series: Materials Science and Engineering
dc.title	Ion source surface processing based on glow discharge in supersonic cross gas flow control
dc.type	Conference Paper
dc.relation.ispartofseries-issue	1
dc.relation.ispartofseries-volume	240
dc.collection	Публикации сотрудников КФУ
dc.source.id	SCOPUS17578981-2017-240-1-SID85034042836

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Публикации сотрудников КФУ Scopus [24551]
Коллекция содержит публикации сотрудников Казанского федерального (до 2010 года Казанского государственного) университета, проиндексированные в БД Scopus, начиная с 1970г.