Ion source surface processing based on glow discharge in supersonic cross gas flow control

Abstract

© Published under licence by IOP Publishing Ltd. Surface treatment by glow discharge in a transverse gas flow provides a number of advantages over magnetron discharge. Sputtering target at lower pressures, which increases the purity of the deposited material. In addition, more uniform erosion of target and thickness of deposited coating. However is necessary to develop glow discharge control system in cross flow working gas, which allow to obtain products with desired characteristics.