MODELING OF THE ION AND FAST ATOM ENERGY SPECTRA IN AN ARGON TOWNSEND DISCHARGE

Abstract

Simulation of argon ion motion in the low-current discharge is fulfilled by the Monte Carlo method, taking into account the charge exchange and elastic scattering on argon atoms. The energy spectra of ions and fast neutrals generated under ion elastic scattering are calculated and their contributions to the cathode sputtering are found.