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| ELEMENTARY MICROWAVE PLASMA SOURCES WITH EXTENDED OPERATING PARAMETERS (FROM LOW TO HIGH- PRESSURES) FOR LARGE AREA DEPOSITION | 176 |
| January 2025 | February 2025 | March 2025 | April 2025 | May 2025 | June 2025 | July 2025 | |
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| ELEMENTARY MICROWAVE PLASMA SOURCES WITH EXTENDED OPERATING PARAMETERS (FROM LOW TO HIGH- PRESSURES) FOR LARGE AREA DEPOSITION | 5 | 10 | 6 | 6 | 3 | 8 | 0 |
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| F_FNTP2017_27.pdf | 13 |
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| Russia | 90 |
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| Kazan | 90 |