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ELEMENTARY MICROWAVE PLASMA SOURCES WITH EXTENDED OPERATING PARAMETERS (FROM LOW TO HIGH- PRESSURES) FOR LARGE AREA DEPOSITION | 138 |
July 2024 | August 2024 | September 2024 | October 2024 | November 2024 | December 2024 | January 2025 | |
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ELEMENTARY MICROWAVE PLASMA SOURCES WITH EXTENDED OPERATING PARAMETERS (FROM LOW TO HIGH- PRESSURES) FOR LARGE AREA DEPOSITION | 7 | 2 | 2 | 2 | 1 | 2 | 0 |
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F_FNTP2017_27.pdf | 12 |
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Russia | 90 |
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Kazan | 90 |