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| ELEMENTARY MICROWAVE PLASMA SOURCES WITH EXTENDED OPERATING PARAMETERS (FROM LOW TO HIGH- PRESSURES) FOR LARGE AREA DEPOSITION | 167 |
| November 2024 | December 2024 | January 2025 | February 2025 | March 2025 | April 2025 | May 2025 | |
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| ELEMENTARY MICROWAVE PLASMA SOURCES WITH EXTENDED OPERATING PARAMETERS (FROM LOW TO HIGH- PRESSURES) FOR LARGE AREA DEPOSITION | 1 | 2 | 5 | 10 | 6 | 6 | 2 |
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| F_FNTP2017_27.pdf | 13 |
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| Russia | 90 |
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