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MODELLING AND CHARACTERIZATION OF ELEMENTARY MICROWAVE PLASMA SOURCES AT MEDIUM PRESSURE (1 TO 50 TORR) FOR HIGH RATE DEPOSITION
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| dc.contributor | Казанский (Приволжский) федеральный университет | |
| dc.contributor.author | Ortega A.M. | ru_RU |
| dc.contributor.author | Bes A. | ru_RU |
| dc.contributor.author | Bechu S. | ru_RU |
| dc.contributor.author | Lacoste A. | ru_RU |
| dc.date.accessioned | 2018-01-10T09:18:31Z | |
| dc.date.available | 2018-01-10T09:18:31Z | |
| dc.date.issued | 2017 | |
| dc.identifier.uri | http://dspace.kpfu.ru/xmlui/handle/net/117382 | |
| dc.description.abstract | - | ru_RU |
| dc.relation.ispartofseries | "ФИЗИКА НИЗКОТЕМПЕРАТУРНОЙ ПЛАЗМЫ" ФНТП-2017 | ru_RU |
| dc.subject | - | ru_RU |
| dc.title | MODELLING AND CHARACTERIZATION OF ELEMENTARY MICROWAVE PLASMA SOURCES AT MEDIUM PRESSURE (1 TO 50 TORR) FOR HIGH RATE DEPOSITION | ru_RU |
| dc.type | article | |
| dc.identifier.udk | - | |
| dc.description.pages | 132-132 |
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"ФИЗИКА НИЗКОТЕМПЕРАТУРНОЙ ПЛАЗМЫ" ФНТП-2017 [232]
материалы Всероссийской (с международным участием) конференции "Физика низкотемпературной плазмы" ФНТП-2017 (Казань,5 - 9 июня 2017 г), 05.06.2017-09.06.2017