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MODELLING AND CHARACTERIZATION OF ELEMENTARY MICROWAVE PLASMA SOURCES AT MEDIUM PRESSURE (1 TO 50 TORR) FOR HIGH RATE DEPOSITION

MODELLING AND CHARACTERIZATION OF ELEMENTARY MICROWAVE PLASMA SOURCES AT MEDIUM PRESSURE (1 TO 50 TORR) FOR HIGH RATE DEPOSITION

Ortega A.M.; Bes A.; Bechu S.; Lacoste A.
URI: http://dspace.kpfu.ru/xmlui/handle/net/117382
Date: 2017

Abstract:

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