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MODELLING AND CHARACTERIZATION OF ELEMENTARY MICROWAVE PLASMA SOURCES AT MEDIUM PRESSURE (1 TO 50 TORR) FOR HIGH RATE DEPOSITION | 236 |
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MODELLING AND CHARACTERIZATION OF ELEMENTARY MICROWAVE PLASMA SOURCES AT MEDIUM PRESSURE (1 TO 50 TORR) FOR HIGH RATE DEPOSITION | 11 | 6 | 3 | 2 | 1 | 16 | 13 |
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FNTP2017_132.pdf | 30 |
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Russia | 110 |
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Kazan | 110 |