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Mathematical simulation of capacitivecoupled radio-frequency discharge when high and low the pressure in the argon: synopsis of dissertation: 01.02.05 - Mechanics of fluid, gas and plasma: 05.13.18 - Mathematical simulation, numerical methods and complexes of programs 152

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Mathematical simulation of capacitivecoupled radio-frequency discharge when high and low the pressure in the argon: synopsis of dissertation: 01.02.05 - Mechanics of fluid, gas and plasma: 05.13.18 - Mathematical simulation, numerical methods and complexes of programs 6 16 9 10 2 2 0

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