Kavetskyy T.; Nuzhdin V.; Valeev V.; Osin Y.; Stepanov A.
(2015)
© 2015, Pleiades Publishing, Ltd. The implantation results of a thin ZnO film formed by vacuum magnetron sputtering when irradiated by Ag<sup>+</sup> ions with an energy of 30 keV, radiation dose of 1.5 × 1017 ion/cm<sup>2</sup>, ...