Zheltukhin V.; Shemakhin A.
(2014)
© 2014, Pleiades Publishing, Ltd. A mathematical model that describes RF plasma flowing at a pressure of 13.3–133 Pa and a Knudsen number of 8 × 10−3 ≤ Kn ≤ 7 × 10−2 for the carrying gas is presented. The model is based ...