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On the Possibility of Applying Fluoride Neodymium-Activated Crystals as Light-Controlled Gates for ArF Laser Radiation (193 nm)

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dc.contributor.author Aglyamov R.D.
dc.contributor.author Naumov A.K.
dc.contributor.author Lovchev A.V.
dc.contributor.author Morozov O.A.
dc.date.accessioned 2022-02-09T20:31:42Z
dc.date.available 2022-02-09T20:31:42Z
dc.date.issued 2021
dc.identifier.issn 0030-400X
dc.identifier.uri https://dspace.kpfu.ru/xmlui/handle/net/168770
dc.description.abstract Abstract: Optical properties of KY3F10:Nd3+, Na3Y6F22:Nd3+, SrF2:Nd3+, and CaF2:Nd3+ fluoride crystals in the UV and VUV spectral regions are presented. Absorption spectra from the ground (4I9/2) and excited (4F3/2) states are recorded in the wavelength range from 190 to 240 nm. The absorption spectra from the excited state demonstrate a significant increase in the absorption coefficients of the investigated samples near 193 nm under IR pumping of the 4F3/2 state of Nd3+ ions. The results obtained show the possibility of applying these crystals as optical gates for the UV and VUV regions, which are controlled by external laser IR radiation (e.g., for excimer ArF laser radiation with a wavelength of 193 nm, which has started to be applied in photolithography).
dc.relation.ispartofseries Optics and Spectroscopy
dc.subject 193 nm
dc.subject absorption from the excited state
dc.subject absorption spectrum
dc.subject excimer ArF laser
dc.subject fluoride crystal
dc.subject neodymium ions
dc.subject optical gate
dc.subject UV
dc.subject VUV
dc.title On the Possibility of Applying Fluoride Neodymium-Activated Crystals as Light-Controlled Gates for ArF Laser Radiation (193 nm)
dc.type Article
dc.collection Публикации сотрудников КФУ
dc.source.id SCOPUS0030400X-2021-SID85121441182


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  • Публикации сотрудников КФУ Scopus [24551]
    Коллекция содержит публикации сотрудников Казанского федерального (до 2010 года Казанского государственного) университета, проиндексированные в БД Scopus, начиная с 1970г.

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