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Photoelectric and magnetic properties of Fe-hyperdoped Si layers formed by the recoil-atom implantation

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dc.contributor.author Batalov R.
dc.contributor.author Bayazitov R.
dc.contributor.author Faizrakhmanov I.
dc.contributor.author Khaibullin R.
dc.contributor.author Tagirov L.
dc.contributor.author Gumarov A.
dc.contributor.author Vdovin V.
dc.date.accessioned 2021-02-25T20:42:49Z
dc.date.available 2021-02-25T20:42:49Z
dc.date.issued 2020
dc.identifier.issn 1369-8001
dc.identifier.uri https://dspace.kpfu.ru/xmlui/handle/net/162272
dc.description.abstract © 2019 Elsevier Ltd The doping of near-surface region of single crystalline p-type Si by Fe impurity under irradiation by the low-energy and high-current Xe+ ion beam is investigated. The recoil-atom implantation method was applied which utilizes simultaneous sputtering of Fe target with irradiation of the deposited Fe atoms on the Si substrate surface by Xe+ ion beam. The resulting incorporation of Fe atoms into Si leads to formation of very thin (~5 nm) highly doped (>1022 at/cm3) surface layer (Si:Fe) containing Si and α-Fe nanoparticles with sizes of 5–20 nm. Such a layer demonstrates ferromagnetism at T = 10 K and superparamagnetism at 300 K. Inversion of the conductivity type (from p-to n-type) in the heavily doped Si:Fe layer and formation of n-p junction to the substrate is observed. A photoresponse of thus obtained n-Si:Fe/p-Si diode structure demonstrates an intense signal in the wavelength range of 500–1200 nm with a maximum at about 950 nm under the low reverse bias voltage (U = 1 V), whose integral intensity is comparable with that for commercial silicon photodiode at U = 10 V.
dc.relation.ispartofseries Materials Science in Semiconductor Processing
dc.subject Ferromagnetism
dc.subject Hyperdoping
dc.subject Ion beam
dc.subject Ion sputtering
dc.subject Iron
dc.subject Nanoparticles
dc.subject Photoresponse
dc.subject Silicon
dc.title Photoelectric and magnetic properties of Fe-hyperdoped Si layers formed by the recoil-atom implantation
dc.type Article
dc.relation.ispartofseries-volume 105
dc.collection Публикации сотрудников КФУ
dc.source.id SCOPUS13698001-2020-105-SID85072540286


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  • Публикации сотрудников КФУ Scopus [24551]
    Коллекция содержит публикации сотрудников Казанского федерального (до 2010 года Казанского государственного) университета, проиндексированные в БД Scopus, начиная с 1970г.

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