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Diffraction grating on chalcogenide glass (GeSe<inf>5</inf>)<inf>80</inf>B<inf>20</inf> fabricated by mask ion implantation
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| dc.contributor.author | Stepanov A.L. | |
| dc.contributor.author | Rogov A.M. | |
| dc.contributor.author | Nuzhdin V.I. | |
| dc.contributor.author | Valeev V.F. | |
| dc.contributor.author | Kavetskyy T.S. | |
| dc.contributor.author | Stronski A.V. | |
| dc.contributor.author | Petkova T. | |
| dc.contributor.author | Petkov P. | |
| dc.date.accessioned | 2021-02-25T20:34:05Z | |
| dc.date.available | 2021-02-25T20:34:05Z | |
| dc.date.issued | 2020 | |
| dc.identifier.issn | 0168-583X | |
| dc.identifier.uri | https://dspace.kpfu.ru/xmlui/handle/net/161775 | |
| dc.description.abstract | © 2019 Elsevier B.V. An approach for creating of a diffraction chalcogenide semiconductor glass grating on the surface of (GeSe5)80B20 layer by low-energy high-dose mask ion implantation is presented. During Ag+-ion implantation, Ag nanoparticles were synthesized in unprotected areas of irradiated glass. The formation of periodic surface microstructures during local ion sputtering of semiconductor glass was observed by scanning electron and atomic force microscopy. With probed a He-Ne laser the efficiency of optical diffraction grating was demonstrated. | |
| dc.relation.ispartofseries | Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | |
| dc.subject | Chalcogenide semiconductor glass | |
| dc.subject | Diffraction grating | |
| dc.subject | Mask ion implantation | |
| dc.subject | Metal nanoparticles | |
| dc.title | Diffraction grating on chalcogenide glass (GeSe<inf>5</inf>)<inf>80</inf>B<inf>20</inf> fabricated by mask ion implantation | |
| dc.type | Article | |
| dc.relation.ispartofseries-volume | 462 | |
| dc.collection | Публикации сотрудников КФУ | |
| dc.relation.startpage | 187 | |
| dc.source.id | SCOPUS0168583X-2020-462-SID85075628863 |
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Публикации сотрудников КФУ Scopus [24551]
Коллекция содержит публикации сотрудников Казанского федерального (до 2010 года Казанского государственного) университета, проиндексированные в БД Scopus, начиная с 1970г.