Kazan Federal University Digital Repository

Pulse ion annealing of silicon layers with silver nanoparticles formed by ion implantation

Show simple item record

dc.contributor.author Stepanov A.L.
dc.contributor.author Batalov R.I.
dc.contributor.author Bayazitov R.M.
dc.contributor.author Rogov A.M.
dc.date.accessioned 2021-02-25T20:33:22Z
dc.date.available 2021-02-25T20:33:22Z
dc.date.issued 2020
dc.identifier.issn 0042-207X
dc.identifier.uri https://dspace.kpfu.ru/xmlui/handle/net/161710
dc.description.abstract © 2020 Elsevier Ltd The paper presents the results of Si surface modification created by implantation with Ag+ ions at energy of 30 keV, current density of 8 μA/cm2 for various doses from 6.0·1015 to 7.5·1016 ion/cm2 and annealed by powerful beam pulses (C+, H+) of nanosecond duration. Scanning electron microscopy and optical reflection measurements showed that after ion implantation an amorphous a-Si layer on the surface of c-Si substrates with Ag nanoparticles was formed. Followed pulse ion beam annealing of sample obtained at lowest dose of 6.0·1015 ion/cm2 leads to melting and recrystallization of the Si surface layer with segregation of Ag nanoparticles. For samples implanted with doses higher than 2.5·1016 ion/cm2 after annealing an epitaxial cellular breakdown structures are fabricated on the Si surface decorated at the cell boundaries by Ag nanoparticles.
dc.relation.ispartofseries Vacuum
dc.subject Ion implantation
dc.subject Pulse ion annealing
dc.subject Silicon
dc.subject Silver nanoparticles
dc.title Pulse ion annealing of silicon layers with silver nanoparticles formed by ion implantation
dc.type Article
dc.relation.ispartofseries-volume 182
dc.collection Публикации сотрудников КФУ
dc.source.id SCOPUS0042207X-2020-182-SID85089943862


Files in this item

This item appears in the following Collection(s)

  • Публикации сотрудников КФУ Scopus [24551]
    Коллекция содержит публикации сотрудников Казанского федерального (до 2010 года Казанского государственного) университета, проиндексированные в БД Scopus, начиная с 1970г.

Show simple item record

Search DSpace


Advanced Search

Browse

My Account

Statistics