Structure of the mathematical model of applying wear-resistant coatings by a high-frequency induction plasma of low pressure

Abstract

© Published under licence by IOP Publishing Ltd. In this scientific work, we proposed a scheme for the transformation of a physical model of applying the HFI plasma coating to a mathematical one in a mathematical way by stepwise solving the problems of the structural model stages. The equations of conservation of energy of the electron gas, Maxwell, continuity and momentum will be used. It is planned to develop a mathematical model for sputtering dielectric and metallic materials. In this case, boundary conditions will be introduced for the discharge power, flow rate and gas types, pressure and design parameters of the plasma torch.