2D model of CCRF discharge with liquid electrode

dc.contributor.author	Chebackova V.
dc.contributor.author	Gaisin A.
dc.contributor.author	Zheltukhin V.
dc.date.accessioned	2020-01-15T21:48:37Z
dc.date.available	2020-01-15T21:48:37Z
dc.date.issued	2019
dc.identifier.issn	1742-6588
dc.identifier.uri	https://dspace.kpfu.ru/xmlui/handle/net/156122
dc.description.abstract	© Published under licence by IOP Publishing Ltd. A mathematical model of RF discharge between metal rod and liquid electrodes in argon media at decreasing pressure in range of 103-105 Pa at a local approach is constructed. Electrons, atomic and dimer ions, excited atoms and dimers of Ar as well as effect of vorticity electromagnetic field and processes on plasma-liquid interphase boundary are considered.
dc.relation.ispartofseries	Journal of Physics: Conference Series
dc.title	2D model of CCRF discharge with liquid electrode
dc.type	Conference Paper
dc.relation.ispartofseries-issue	2
dc.relation.ispartofseries-volume	1158
dc.collection	Публикации сотрудников КФУ
dc.source.id	SCOPUS17426588-2019-1158-2-SID85063808699

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