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On the question of structure of ZnO thin films formed by IBAD and subsequently implanted with silver ions

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dc.contributor.author Lyadov N.
dc.contributor.author Kashapov R.
dc.contributor.author Vakhitov I.
dc.contributor.author Gumarov A.
dc.contributor.author Shustov V.
dc.contributor.author Faizrakhmanov I.
dc.date.accessioned 2019-01-22T20:47:29Z
dc.date.available 2019-01-22T20:47:29Z
dc.date.issued 2018
dc.identifier.issn 1742-6588
dc.identifier.uri https://dspace.kpfu.ru/xmlui/handle/net/148792
dc.description.abstract © 2018 Institute of Physics Publishing. All rights reserved. Nanocrystalline ZnO thin films with a thickness of ∼ 235 nm were synthesized by ion beam-assisted deposition (IBAD) technique using a metal target of zinc and oxygen (O2) as a reactive gas. The near-surface region of the synthesized films was subsequently implanted with 30 keV Ag+ ions in the fluence range of (0.25-1)×1017 ion/cm2 at high ion current density of 12 μA/cm2. The structure parameters and morphology of as-deposited and subsequently implanted with silver ions ZnO films were investigated by X-ray diffraction and scanning electron microscopy techniques. It was found that the as-deposited ZnO films have inhomogeneous structure, which consists of nanocrystallites and disordered amorphous phase. The nanocrystallites of the obtained ZnO thin films have values of lattice parameters higher than for a bulk ZnO. Subsequent implantation with silver ions leads to a significant radiation heating and microstress relaxation of the film as well as to an increase in the size of nanocrystallites due to the amorphous phase.
dc.relation.ispartofseries Journal of Physics: Conference Series
dc.title On the question of structure of ZnO thin films formed by IBAD and subsequently implanted with silver ions
dc.type Conference Paper
dc.relation.ispartofseries-issue 1
dc.relation.ispartofseries-volume 1058
dc.collection Публикации сотрудников КФУ
dc.source.id SCOPUS17426588-2018-1058-1-SID85051866321


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  • Публикации сотрудников КФУ Scopus [24551]
    Коллекция содержит публикации сотрудников Казанского федерального (до 2010 года Казанского государственного) университета, проиндексированные в БД Scopus, начиная с 1970г.

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