Radio-Frequency Discharge at Low Pressure: A Non-local Problem Statement Approach

Abstract

© 2016 The Authors.Self-consistent nonlocal nonlinear mathematical CCRF discharge model is constructed. The model includes the convection - diffusion equations for electronic and ionic gas, Poisson's equation for electric field potential, the equation of balance of metastable as well as ground states neutral atoms, and stationary equation of heat conductivity for electronic and ionic gases. An algorithm for the numerical solutions of the model has been described. The results of test calculations of CCRF discharge characteristics at the interelectrode distance of 2.2 cm, the gas pressure of 13.3 Pa, the voltage amplitude of 65 V were obtained. Comparison of the results showed the accuracy of the results and proved the adequacy of the mathematical model and the method of calculation.