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Gas dynamic characteristics of glow discharge chamber for functional coating deposition
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| dc.contributor.author | Israphilov D. | |
| dc.date.accessioned | 2018-09-19T21:36:16Z | |
| dc.date.available | 2018-09-19T21:36:16Z | |
| dc.date.issued | 2017 | |
| dc.identifier.issn | 1742-6588 | |
| dc.identifier.uri | https://dspace.kpfu.ru/xmlui/handle/net/144194 | |
| dc.description.abstract | © Published under licence by IOP Publishing Ltd.In article shown conditions of glow discharge existence at low pressures. Described possibility of organizing glow discharge at very low pressures due to the supersonic gas flow in a limited area of the discharge chamber. Procedure of supersonic flow regime calculating in vacuum chamber for coating deposition shown. | |
| dc.relation.ispartofseries | Journal of Physics: Conference Series | |
| dc.title | Gas dynamic characteristics of glow discharge chamber for functional coating deposition | |
| dc.type | Conference Paper | |
| dc.relation.ispartofseries-issue | 1 | |
| dc.relation.ispartofseries-volume | 789 | |
| dc.collection | Публикации сотрудников КФУ | |
| dc.source.id | SCOPUS17426588-2017-789-1-SID85014589161 |
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Публикации сотрудников КФУ Scopus [24551]
Коллекция содержит публикации сотрудников Казанского федерального (до 2010 года Казанского государственного) университета, проиндексированные в БД Scopus, начиная с 1970г.