Low temperature plasma RF capacitive discharge in helium at atmospheric pressure

dc.contributor.author	Hakki A.
dc.contributor.author	Fayrushin I.
dc.contributor.author	Kashapov N.
dc.date.accessioned	2018-09-19T21:35:04Z
dc.date.available	2018-09-19T21:35:04Z
dc.date.issued	2016
dc.identifier.issn	1742-6588
dc.identifier.uri	https://dspace.kpfu.ru/xmlui/handle/net/144158
dc.description.abstract	The paper describes Low temperature plasma RF capacitive discharge in helium at atmospheric pressure. The circuit has been done, to obtain output currentabout 90mA,and the maximum power was 100W, The frequency of the discharging was f = 40MHz.Twolamps (&Gcy;&Ucy;-50) were used in power supply. Helium consumption was about 1.5l/m.
dc.relation.ispartofseries	Journal of Physics: Conference Series
dc.title	Low temperature plasma RF capacitive discharge in helium at atmospheric pressure
dc.type	Conference Paper
dc.relation.ispartofseries-issue	1
dc.relation.ispartofseries-volume	669
dc.collection	Публикации сотрудников КФУ
dc.source.id	SCOPUS17426588-2016-669-1-SID84964666589

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