Evaluation of the effectiveness of the use of arc plasma generator with distributed parameters for the deposition of functional coatings at low pressures.

dc.contributor.author	Kashapov N.
dc.contributor.author	Yu Dautov G.
dc.contributor.author	Dautov I.
dc.contributor.author	Zakirova G.
dc.date.accessioned	2018-09-19T21:34:50Z
dc.date.available	2018-09-19T21:34:50Z
dc.date.issued	2016
dc.identifier.issn	1742-6588
dc.identifier.uri	https://dspace.kpfu.ru/xmlui/handle/net/144150
dc.description.abstract	The estimation of the mean mass enthalpy at the outlet of the plasmatron with distributed parameters. Non-equilibrium plasma at low pressures allows to combine the processes of plasma treatment and sputtering. It is necessary to consider the influence of electrode erosion.
dc.relation.ispartofseries	Journal of Physics: Conference Series
dc.title	Evaluation of the effectiveness of the use of arc plasma generator with distributed parameters for the deposition of functional coatings at low pressures.
dc.type	Conference Paper
dc.relation.ispartofseries-issue	1
dc.relation.ispartofseries-volume	669
dc.collection	Публикации сотрудников КФУ
dc.source.id	SCOPUS17426588-2016-669-1-SID84964653581

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Публикации сотрудников КФУ Scopus [24551]
Коллекция содержит публикации сотрудников Казанского федерального (до 2010 года Казанского государственного) университета, проиндексированные в БД Scopus, начиная с 1970г.