Simulation of RF plasma flowing at low pressure

dc.contributor.author	Zheltukhin V.
dc.contributor.author	Shemakhin A.
dc.date.accessioned	2018-09-18T20:47:57Z
dc.date.available	2018-09-18T20:47:57Z
dc.date.issued	2014
dc.identifier.issn	2070-0482
dc.identifier.uri	https://dspace.kpfu.ru/xmlui/handle/net/142279
dc.description.abstract	© 2014, Pleiades Publishing, Ltd. A mathematical model that describes RF plasma flowing at a pressure of 13.3–133 Pa and a Knudsen number of 8 × 10−3 ≤ Kn ≤ 7 × 10−2 for the carrying gas is presented. The model is based on the statistical approach for a neutral plasma component and on a continuum model for electron and ion components. The results of the calculation for the neutral plasma component flowing in an undisturbed flow and, if the sample is in a circumfluent flow, are presented. The results of the calculation for the problem on an electron-ion gas are also given.
dc.relation.ispartofseries	Mathematical Models and Computer Simulations
dc.subject	jet flow
dc.subject	low pressure
dc.subject	Monte-Carlo method
dc.subject	radio-frequency plasma
dc.subject	simulation
dc.subject	statistical simulation
dc.subject	transient mode
dc.title	Simulation of RF plasma flowing at low pressure
dc.type	Article
dc.relation.ispartofseries-issue	1
dc.relation.ispartofseries-volume	6
dc.collection	Публикации сотрудников КФУ
dc.relation.startpage	101
dc.source.id	SCOPUS20700482-2014-6-1-SID84925970675

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Публикации сотрудников КФУ Scopus [24551]
Коллекция содержит публикации сотрудников Казанского федерального (до 2010 года Казанского государственного) университета, проиндексированные в БД Scopus, начиная с 1970г.