Abnormal glow discharge in crossed electric and magnetic fields in the presence of reactive gas

dc.contributor.author	Luchkin A.
dc.contributor.author	Kashapov N.
dc.contributor.author	Luchkin G.
dc.date.accessioned	2018-09-18T20:25:02Z
dc.date.available	2018-09-18T20:25:02Z
dc.date.issued	2013
dc.identifier.issn	1742-6588
dc.identifier.uri	https://dspace.kpfu.ru/xmlui/handle/net/139665
dc.description.abstract	The results of investigations of the low-temperature plasma at process of reactive magnetron sputtering of Ti target in the presence of reactive gas are described. Discharge volt-ampere characteristics for different schemas of reactive gas input are build. Optimal regimes of making strengthening coatings are defined. TiOx (0 < x < 2) strengthening coatings at plastics are made. Coatings showed high consumer qualities. © Published under licence by IOP Publishing Ltd.
dc.relation.ispartofseries	Journal of Physics: Conference Series
dc.title	Abnormal glow discharge in crossed electric and magnetic fields in the presence of reactive gas
dc.type	Conference Paper
dc.relation.ispartofseries-issue	1
dc.relation.ispartofseries-volume	479
dc.collection	Публикации сотрудников КФУ
dc.source.id	SCOPUS17426588-2013-479-1-SID84891812367

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Коллекция содержит публикации сотрудников Казанского федерального (до 2010 года Казанского государственного) университета, проиндексированные в БД Scopus, начиная с 1970г.