Mathematical model of interaction of low-pressure RF discharge plasma with solid surfaces

dc.contributor.author	Abdullin I.
dc.contributor.author	Zheltukhin V.
dc.contributor.author	Shaekhov M.
dc.date.accessioned	2018-09-18T20:14:57Z
dc.date.available	2018-09-18T20:14:57Z
dc.date.issued	2006
dc.identifier.issn	1062-8738
dc.identifier.uri	https://dspace.kpfu.ru/xmlui/handle/net/137944
dc.description.abstract	It was shown that upon treatment of solids in a low-pressure (1.33-133 Pa) RF plasma the positive charge layer formed near the treated solid not only accelerates ions but also concentrates the ion flux at local inhomogeneities of the surface charge density. © 2007 by Allerton Press, Inc.
dc.relation.ispartofseries	Bulletin of the Russian Academy of Sciences: Physics
dc.title	Mathematical model of interaction of low-pressure RF discharge plasma with solid surfaces
dc.type	Conference Paper
dc.relation.ispartofseries-issue	8
dc.relation.ispartofseries-volume	70
dc.collection	Публикации сотрудников КФУ
dc.relation.startpage	1342
dc.source.id	SCOPUS10628738-2006-70-8-SID34247505588

Files in this item

Name: SCOPUS10628738-20 ...

Size: 43.08Kb

Format: PDF

Публикации сотрудников КФУ Scopus [24551]
Коллекция содержит публикации сотрудников Казанского федерального (до 2010 года Казанского государственного) университета, проиндексированные в БД Scopus, начиная с 1970г.