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dc.contributor.author | Abdullin I. | |
dc.contributor.author | Zheltukhin V. | |
dc.contributor.author | Shaekhov M. | |
dc.date.accessioned | 2018-09-18T20:14:57Z | |
dc.date.available | 2018-09-18T20:14:57Z | |
dc.date.issued | 2006 | |
dc.identifier.issn | 1062-8738 | |
dc.identifier.uri | https://dspace.kpfu.ru/xmlui/handle/net/137944 | |
dc.description.abstract | It was shown that upon treatment of solids in a low-pressure (1.33-133 Pa) RF plasma the positive charge layer formed near the treated solid not only accelerates ions but also concentrates the ion flux at local inhomogeneities of the surface charge density. © 2007 by Allerton Press, Inc. | |
dc.relation.ispartofseries | Bulletin of the Russian Academy of Sciences: Physics | |
dc.title | Mathematical model of interaction of low-pressure RF discharge plasma with solid surfaces | |
dc.type | Conference Paper | |
dc.relation.ispartofseries-issue | 8 | |
dc.relation.ispartofseries-volume | 70 | |
dc.collection | Публикации сотрудников КФУ | |
dc.relation.startpage | 1342 | |
dc.source.id | SCOPUS10628738-2006-70-8-SID34247505588 |