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Numerical solution of the initial boundary value problems of radio-frequency capacitive coupled discharge.

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dc.contributor.author Badriev I.
dc.contributor.author Zheltukhin V.
dc.contributor.author Ju Chebakova V.
dc.date.accessioned 2018-04-05T07:09:58Z
dc.date.available 2018-04-05T07:09:58Z
dc.date.issued 2017
dc.identifier.issn 1742-6588
dc.identifier.uri http://dspace.kpfu.ru/xmlui/handle/net/130098
dc.description.abstract © Published under licence by IOP Publishing Ltd. We present the numerical method, which allow to calculation of the charged particles flow density in the areas with heavy gradients of charged particles density and changing of convection-diffusion non-steady equation coefficients for charged particles concentration finding by the solution of electrons balance initial boundary value problem.
dc.relation.ispartofseries Journal of Physics: Conference Series
dc.title Numerical solution of the initial boundary value problems of radio-frequency capacitive coupled discharge.
dc.type Conference Paper
dc.relation.ispartofseries-issue 1
dc.relation.ispartofseries-volume 927
dc.collection Публикации сотрудников КФУ
dc.source.id SCOPUS17426588-2017-927-1-SID85037681324


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  • Публикации сотрудников КФУ Scopus [24551]
    Коллекция содержит публикации сотрудников Казанского федерального (до 2010 года Казанского государственного) университета, проиндексированные в БД Scopus, начиная с 1970г.

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